Calibre-based OPC Flow (SVG Diagram)

GDS Layout Design Prep / Fracturing Rule-based OPC Bias · Serif · Hammerhead Model-based OPC Litho Simulation Hopkins + Mack Model ILT (Optional) Hotspots / Critical Regions OPC Verification CD · PV Band · Process Window Mask Data Prep & Tape-out
Reading guide:
• Blue box: Core accuracy driver (Model-based OPC)
• Yellow box: Optional high-cost optimization (ILT)
• Gray boxes: Standard production steps

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